Trimethylsilane CAS No. 993-07-7


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Product Name Trimethylsilane
Synonims 3MS; 2-Methyl-2-silapropane; Trimethylsilylhydride
CAS No. 993-07-7
Formula (CH3)3SiH
Appearance (Form) Colorless Liquefied Gas
Molecular weight 74.20
Melting point -135.9°C
Boiling point 6.7°C
Vapor pressure 1.218 mm Hg at 25°C
Density 0.638 g/mL
Recommended storage Outside or detached storage is preferred. Protect from physical damage. Cylinders should be stored
upright with valve protection cap in place and firmly secured to prevent falling. Store in cool, dry, well-ventilated area of non-combustible construction away from heavily trafficked areas and emergency exits. Keep at temperatures below 52°C / 125°F. Full and empty cylinders should be segregrated. Use a “first in-first out” inventory system to prevent full cylinders from being stored for excessive periods of time. Always store and handle compressed gas cylinders in accordance with Compressed Gas Association, pamphlet CGA-P1, Safe Handling of Compressed Gases in Containers.
Applications Used in the semiconductor industry as an etchant in the plasma phase.
Purity 99%, UHP
Transport information UN3161,Liquefied gas, flammable, n.o.s.,(Trimethylsilane),2.1