Methylsilane CAS No. 992-94-9


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Product Name Methylsilane
CAS No. 992-94-9
Formula H3CSiH3
Appearance (Form) flammable, colourless, liquified, compressed gas
Molecular weight 46.14
Melting point -157°C
Boiling point -57°C
Vapor pressure 241 mm Hg at -80°C
Density 0.628 g/mL
Recommended storage Store in cool, dry, well-ventilated area of non-combustible construction away from heavily
trafficked areas and emergency exits. Keep at temperatures below 52°C / 125°F. Cylinders should
be stored upright with valve protection cap in place and firmly secured to prevent falling. Full and
empty cylinders should be segregrated. Use a “first in-first out” inventory system to prevent full
cylinders from being stored for excessive periods of time. Stored containers should be periodically
checked for general condition and leakage. Outside or detached storage is preferred.
Applications Deposition thin films SiC
Purity 99%, UHP
Transport information UN/ID no. UN3161
Proper shipping name Liquefied gas, flammable, n.o.s.
Hazard Class 2,1
Special Provisions T50
Description UN3161, Liquefied gas, flammable, n.o.s. (Methyl Silane), 2.1
Emergency Response Guide Number 115