Hexachlorodisiloxane CAS No. 14986-21-1


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Product Name Hexachlorodisiloxane
Synonims Hexachloro-disiloxan, 1,1,1,3,3,3-Hexachloropropanedisiloxane, 1,3-Dichloro-1,1,3,3 tetrachloropropanedisiloxane, Hexachloropropanedisiloxane, Oxybis(trichlorosilane)
CAS No. 14986-21-1
Formula (Cl3Si)2O
Appearance (Form) Clear colorless to light yellow liquid
Molecular weight 284.89
Melting point <0°C
Boiling point 137°C
Vapor pressure 1.5 mm Hg at 0°C
Density 1.575 g/mL at 25°C
Recommended storage Handle and store under dry inert gas. AIR SENSTITIVE. Keep container tightly sealed.
Applications Deposition thin films SiO2 by CVD & ALD.
Purity 99,9%, UHP
Transport information Chlorosilanes, n.o.s. (Hexachlorodisiloxane)
Class 8