Hexachlorodisilane CAS No. 13465-77-5
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| Product Name | Hexachlorodisilane |
| Synonims | 1,1,1,2,2,2-Hexachlorodisilane, Disilicon hexachloride, HCDS |
| CAS No. | 13465-77-5 |
| Formula | Si2Cl6 |
| Appearance (Form) | Clear, colorless Liquid |
| Molecular weight | 268.89 |
| Melting point | -1°C |
| Boiling point | 144 – 145.5°C |
| Vapor pressure | 12 mm Hg at 40°C |
| Density | 1.562 g/mL at 25°C |
| Recommended storage | Keep in a dry, cool and well-ventilated place. Keep container tightly closed. Protect from moisture. Corrosives area. Long-term storage is not recommended. Keep under nitrogen. Keep containers tightly closed in a dry, cool and well-ventilated place. |
| Applications | HCDS is used to grow thin films of Si, SiO2, SiC, Si3N4 by chemical vapor deposition. HCDS can be used at relatively low temperatures; powerful deoxygenating agent; reducing agent; fiber optics, solar energy products; aiding ALD process. |
| Purity | 96%, 99%, UHP |
| Transport information | Proper Shipping Name: Chlorosilanes, Corrosive, n.o.s. (Hexachlorodisilane) UN2987 Class: 8 Hazard Label: Corrosive Packing Group: II |