Hexachlorodisilane CAS No. 13465-77-5


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Product Name Hexachlorodisilane
Synonims 1,1,1,2,2,2-Hexachlorodisilane, Disilicon hexachloride, HCDS
CAS No. 13465-77-5
Formula Si2Cl6
Appearance (Form) Clear, colorless Liquid
Molecular weight 268.89
Melting point -1°C
Boiling point 144 – 145.5°C
Vapor pressure 12 mm Hg at 40°C
Density 1.562 g/mL at 25°C
Recommended storage Keep in a dry, cool and well-ventilated place. Keep container tightly closed. Protect from moisture. Corrosives area. Long-term storage is not recommended. Keep under nitrogen. Keep containers tightly closed in a dry, cool and well-ventilated place.
Applications HCDS is used to grow thin films of Si, SiO2, SiC, Si3N4 by chemical vapor deposition. HCDS can be used at relatively low temperatures; powerful deoxygenating agent; reducing agent; fiber optics, solar energy products; aiding ALD process.
Purity 96%, 99%, UHP
Transport information Proper Shipping Name: Chlorosilanes, Corrosive, n.o.s. (Hexachlorodisilane) UN2987
Class: 8
Hazard Label: Corrosive
Packing Group: II