Diethylsilane CAS No. 542-91-6

 

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Product Name Diethylsilane
Synonims Diethylsilane; Silane, diethyl-; diethylsilicon
CAS No. 542-91-6
Formula (C2H5)2SiH2
Appearance (Form) Colorless liquid
Molecular weight 88.22
Melting point -134.39°C
Boiling point 56°C at 1.013 hPa
Vapor pressure N/A
Density 0.681 g/mL at 25°C
Recommended storage Keep in a cool, dry, well-ventilated place. Keep away from heat, sparks, and open flame
Applications A reagent employed in the chemical vapor deposition of SiO2 for microelectronics.
Purity 98%, 99%, UHP
Transport information Proper Shipping Name: Flammable liquids, n.o.s.
UN1993
Class: 3
Hazard Label: Flammable liquid
Packing Group: II